| 摘要 |
A turbomolecular pump comprising a rotor (R) and a stator (S) housed in a casing (16) and forming an exhaust channel there-between, and a suction port (18) and a discharge port (49) formed in the casing (16): wherein the turbomolecular pump has a valve body (20) for opening and closing the suction port (18), the valve body (20) is movable in an axial direction of the turbomolecular pump, a valve driving mechanism (54) for driving the valve body (20) via a valve body supporting member (50) which extends through a throughhole (52) formed in the rotor and/or the stator and magnetic bearing units (70,72) for non-contactingly supporting the valve body supporting member (50) within the throughhole (52), whereby a turbomolecular pump having a compact overall construction including valve units can be provided. <IMAGE> |
