| 摘要 |
PROBLEM TO BE SOLVED: To make the coercive force of a hard ferromagnetic layer larger and to strengthen its interaction with a soft ferromagnetic layer by isolating two kinds of soft ferromagnetic layers with a nonmagnetic layer, removing the surface of one of the soft ferromagnetic layers slightly and cleaning it and forming minute protrusions and recessions, and forming a hard layer after that. SOLUTION: A nonmagnetic conductive layer 4 is formed on a soft ferromagnetic layer 3 formed on a substrate 1, and a soft ferromagnetic layer 5 is formed on it. After that, the surface of the said soft ferromagnetic layer 5 is slightly removed by reverse sputtering and cleaned. Along with it, minute protrusions and recessions are formed, and a hard layer 6 is formed after that. As the result, it becomes possible to form a multilayered magentoresistive element. Along with it, interaction between the hard ferromagnetic layer 6 and the soft ferromagnetic layer 5 becomes strong, and it becomes possible to detect an outside magnetic field more stably. |
