发明名称 |
A volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same |
摘要 |
<p>A novel organometallic compound of formula MÄ( mu OR')2M'R2Ü2 can be vaporised at a low temperature and advantageously employed in the CVD of a heterometallic oxide film of the MM'2O4 type, wherein M is a divalent element such as Be, Mg, Zn or Cd; M' is a Group 13 element such as Al or Ga; and R and R' are each independently a C1-10 alkyl group, with the proviso that if M is Mg, M' is not Al. <IMAGE></p> |
申请公布号 |
EP0897925(A2) |
申请公布日期 |
1999.02.24 |
申请号 |
EP19980115089 |
申请日期 |
1998.08.11 |
申请人 |
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY |
发明人 |
KIM, YUN-SOO;KOH, WON-YONG;KU, SU-JIN;KIM, CHANG-GYOUN;YU, KYU-SANG |
分类号 |
C30B29/22;C07F3/02;C07F5/00;C07F5/06;C23C16/18;C23C16/40;(IPC1-7):C07F5/06;C23C16/30 |
主分类号 |
C30B29/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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