DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER,申请号EP19970919305-传众专利搜索

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发明名称	DEVICE AND PROCESS FOR TREATING SUBSTRATES IN A FLUID CONTAINER
摘要
申请公布号	EP0897593(A1)	申请公布日期	1999.02.24
申请号	EP19970919305	申请日期	1997.03.27
申请人	STEAG MICROTECH GMBH;IMEC VZW	发明人	WEBER, MARTIN;MEURIS, MARC;CORNELISSEN, INGRID
分类号	B65G49/04;B65G49/07;H01L21/00;H01L21/304;H01L21/673;(IPC1-7):H01L21/00	主分类号	B65G49/04
代理机构		代理人
主权项
地址

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