CHUCK MECHANISM OF ABRASIVE BOARD

摘要

PROBLEM TO BE SOLVED: To carry out super high precision flat precision specular finishing and flattening finishing for making a sucking part of a work on which a sucking mark remains an outer peripheral edge part of the work and making a necessary portion of the work flawless. SOLUTION: This chuck mechanism is furnished with a sticking base 1 having a sticking surface 1a to stick a work W; a sucking port 2 opened slightly smaller in diameter than the work W on the sticking surface 1a of the sticking base 1; a valve seat chamber 3 formed on a deep part of the sucking port 2; a valve member 4 forming a valve seat 4a incorporated in the valve seat chamber 3 and a work support base having a work support surface 4b; a chuck base 5 to support and fix the sticking base 1; through holes 6 drilled on the chuck base 5 and the sticking base 1 to communicate them to the valve seat chamber 3; a ventilating hole 7 for work connection and disconnection communicated to the sucking port 2 of the sticking base 1 through the chuck base 5; and a ventilating air flowing system 8 communicated to the ventilating hole 7 and the through hole of the chuck base 5.