| 摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration of in-plane uniformity in polishing caused by conditioning, and shorten a conditioning time. SOLUTION: A conditioner speed in the radial direction on of a polishing table 1 is changed to keep constant a relative speed of the table 1 to a conditioner 5 irrespective of their positions by rotating the polishing table 1, rotating the cylindrical or truncated cone-shaped conditioner 5 while pressing it to an abrasive cloth 2, and changing a rotational speed of the conditioner in response to a radial directional speed difference of the table in accompaniment of rotation of the table 1, a diametric difference of the conditioner 5 or a position of the conditioner 5. Since the relative speed is determined by a conditioner speed irrespective of a rotational frequency of the table, conditioning equivalent to conventional one is attained in a short time by increasing the relative speed. |
