| 摘要 |
A pressure sensor package and method for producing the same. The package includes a pressure sensor base, a pressure sensor diaphragm positioned over the pressure sensor base, and a pressure sensor cap positioned over the pressure sensor diaphragm and secured relative to the pressure sensor base such that a portion of the pressure sensor diaphragm is deformed between the pressure sensor cap and the pressure sensor base. The deformation can occur along a line of deformation, preferably to form a closed path adjacent a periphery of the pressure sensor diaphragm. In one embodiment, the pressure sensor diaphragm is deformed between an inner surface of the pressure sensor cap and an outer surface of the pressure sensor base along the line of deformation, and the inner surface and the outer surface diverge from each other when moving away from the line of deformation. For example, the pressure sensor diaphragm can be deformed between a concave inner radius and a convex outer radius, wherein the inner radius is larger than the outer radius.
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