发明名称 |
Wideband vibration sensor |
摘要 |
This invention relates to an apparatus for making highly sensitive measurements of acceleration. The vibration sensor includes the use of a movable gate field effect transistor to sense the motion of a cantilever beam with respect to its base, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.
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申请公布号 |
US5874675(A) |
申请公布日期 |
1999.02.23 |
申请号 |
US19970821042 |
申请日期 |
1997.03.20 |
申请人 |
INTERSCIENCE, INC. |
发明人 |
EDMANS, DANIEL M.;GUTIERREZ, ADOLFO;CORMEAU, CHRISTOPHER;MABY, EDWARD |
分类号 |
G01P15/12;G01P15/13;(IPC1-7):G01P15/13 |
主分类号 |
G01P15/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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