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发明名称
MIRROR POLISHING METHOD AND DEVICE FOR WORK EDGE
摘要
申请公布号
JPH1148109(A)
申请公布日期
1999.02.23
申请号
JP19970260917
申请日期
1997.09.09
申请人
SPEEDFAM CO LTD
发明人
HAKOMORI SHIYUNJI
分类号
B24B9/00;H01L21/304;(IPC1-7):B24B9/00
主分类号
B24B9/00
代理机构
代理人
主权项
地址
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