| 摘要 |
PROBLEM TO BE SOLVED: To prevent by-products and solid substances in a chemical liq. from sticking on a circulation passage by an apparatus wherein a compressed air pressure is used for a liq. transferring means and opening/closing of an electromagnetic valve for controlling air supply and a valve for controlling the liq. are controlled in accordance with the liq. face level of an overflow tank storing a chemical liq. overflowing an immersion tank. SOLUTION: When an immersion apparatus is operated, at first, an electromagnetic valve 5 for controlling air supply is opened to supply compressed air into a pressure tank 1 and a chemical liq. in the pressure tank 1 is transferred to the first tank 3A of a quantitative feeding tank 3 through a pipeline 10. The chemical liq. in the tank 3A is passed through a quantitative feeding valve 4 and a specified amt. thereof is fed in an immersion tank 2A through a feeding tank 2C. The chemical liq. overflowed the first tank 3A is discharged through the second tank 3B. On the other hand, the chemical liq. overflowed the immersion tank 2A is stored once in an overflow tank 2B and when the liq. face level detected by means of a liq. face detecting sensor 6 provided in this tank 2B reaches a specified value, the electromagnetic valve 5 is closed and a valve 7 for controlling the liq. is opened to return the chemical liq. in the tank 2B to a pressure tank 1. |
