| 摘要 |
A semiconductor device testing apparatus in which ICs to be tested are transferred to a test tray TST in a loader section, the test tray is transported into a test section to test the ICs, after the completion of the test, the tested ICs on the test tray are transferred from the test tray onto a general-purpose tray in an unloader section, and the test tray which has been emptied of the tested ICs is transported to the loader section, and the above operation is repeated, and which can detect whether there is an IC on the test tray or not is provided. An IC detecting sensor for monitoring whether an IC exists on the test tray or not is provided at at least one of the positions between the unloader section and the loader section, the loader section and the test section, and the test section and the unloader section. A through-hole is provided in the bottom portion of each IC carrier mounted to the test tray, and whether an IC carrier mounted to the test tray is empty or not is determined by detecting light transmitted through the through-hole by the IC detecting sensor. |
