发明名称 |
TESTING APPARATUS OF WAFER PARTICLE |
摘要 |
A pretreatment system for analyzing impurities contained in a flat sample contains a cylindrical lower case having a stepped portion on which the flat sample is seated. The stepped portion is formed in an circumferential inner surface of the cylindrical lower case. A cylindrical upper case is detachably attached to an upper surface of the lower case, and has a supply passage through which a predetermined amount of pretreatment solution can be supplied to the flat sample. A cover closes off the upper surface of the upper case. |
申请公布号 |
KR0169786(B1) |
申请公布日期 |
1999.02.18 |
申请号 |
KR19950053373 |
申请日期 |
1995.12.21 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JOO, JIN-HO;KANG, SUNG-CHUL;KO, YONG-KYUN |
分类号 |
G01N1/28;G01N1/34;H01L21/00;H01L21/304;H01L21/673;H01L21/687;(IPC1-7):H01L21/304 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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