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发明名称
A CHEMICAL SUPPLYING APPARATUS FOR SEMICONDUCTOR DEVICE FABRICATION EQUIPMENT
摘要
申请公布号
KR0166207(B1)
申请公布日期
1999.02.18
申请号
KR19950042509
申请日期
1995.11.21
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, YONG-SOO;KIM, MIN-HUN;PARK, KYUNG-SEO;JUN, KI-HYUN
分类号
H01L21/18;(IPC1-7):H01L21/18
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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