SURFACE EMITTING SEMICONDUCTOR LASER AND MANUFACTURING METHOD THEREFOR

摘要

A light source of a semiconductor laser beam scanner which has high resolution at the time of scanning, is suitable for emitting a laser beam from the surface, and has a high degree of freedom of mounting is disclosed. A surface emitting semiconductor laser having at least a first mirror (102), an active layer (103), a current constriction layer (113), a contact layer (106) and a second mirror (111) on a semiconductor substrate (101). The current constriction layer (113) is constitued by a stripe-shaped AlAs layer (105) and an aluminum oxide layer (108) so formed as to surround the AlAs layer (105). The contact layer (106) is formed in the shape of comb tooth (109) in a region where it overlaps the aluminum oxide layer, and mutually independent contact electrodes (110) are formed respectively on the upper surfaces of the comb teeth (109) of the contact layer.