发明名称 Production of very high purity air
摘要 Chemical compounds apart from nitrogen, oxygen and inert gas contained in the output air are adsorbed and removed. Low temperature adsorption treatment (3) of the output air obtained from the atmosphere is carried out between minus 40 degrees C and minus 180 degrees C.
申请公布号 DE19808199(A1) 申请公布日期 1999.02.18
申请号 DE19981008199 申请日期 1998.02.27
申请人 TAIYO TOYO SANSO CO., LTD., OSAKA, JP;MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 MIZUNO, MASASHI, OSAKA, JP;TADA, MASUO, OSAKA, JP;YAMAZAKI, NORIO, OSAKA, JP;FUKUMOTO, TAKAAKI, TOKIO/TOKYO, JP
分类号 B01D53/02;B01D53/04;F24F3/16;(IPC1-7):F24F7/00 主分类号 B01D53/02
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