发明名称 Component separation method for removal from foil
摘要 The method involves subjecting the rear of the foil (4) to an ultrasonic field or ultraviolet light which separates the components (5) from the foil. The foil is arranged so that the separated components pass to a collection region
申请公布号 DE19734635(A1) 申请公布日期 1999.02.18
申请号 DE19971034635 申请日期 1997.08.11
申请人 GENERAL SEMICONDUCTOR IRELAND, MACROOM, COUNTY CORK, IE 发明人 SCHROEDER, JOHANN, DIPL.-ING., 79263 SIMONSWALD, DE;STRITTMATTER, RAINER, 79108 FREIBURG, DE
分类号 H01L21/00;H01L21/68;(IPC1-7):H01L21/58 主分类号 H01L21/00
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