<p>Disclosed is an aluminum nitride body having graded metallurgy and a method for making such a body. The aluminum nitride body has at least one via and includes a first layer in direct contact with the aluminum nitride body and a second layer in direct contact with, and that completely encapsulates, the first layer. The first layer includes 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent tungsten and/or molybdenum while the second layer includes 90 to 100 volume percent of tungsten and/or molybdenum and 0 to 10 volume percent of aluminum nitride.</p>
申请公布号
KR0170564(B1)
申请公布日期
1999.02.18
申请号
KR19950052569
申请日期
1995.12.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;THE CARBORUNDUM COMPANY
发明人
CASEY, JON ALFRED;CORDERO, CARLA NATALIA;FASANO, BENJAMIN VITO;GOLAND, DAVID BRIAN;HANNON, ROBERT;HARRIS, JONATHAN H.;HERRON, LESTER WYNN;JOHNSON, NIRANJAN M.