METHOD FOR PRODUCING SELF-ALIGNED CONTACTS BETWEEN VERTICALLY SEPARATED WIRING LAYERS ON AN INTEGRATED CIRCUIT,申请号KR19890018850-传众专利搜索

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发明名称	METHOD FOR PRODUCING SELF-ALIGNED CONTACTS BETWEEN VERTICALLY SEPARATED WIRING LAYERS ON AN INTEGRATED CIRCUIT
摘要
申请公布号	KR0169713(B1)	申请公布日期	1999.02.18
申请号	KR19890018850	申请日期	1989.12.16
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	ROSKA, GUNTHER;WINNERL, JOSEF;NEPPL, FRANZ
分类号	H01L21/3213;H01L21/768;(IPC1-7):H01L21/82	主分类号	H01L21/3213
代理机构		代理人
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