HYBRID OPTICAL INTEGRATED CIRCUIT AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To make it possible to easily match the height of the core of an optical waveguide with the height of the active layer of a semiconductor optical element. SOLUTION: The front surface of the hill 1a of a silicon substrate 1 and the front surface of a lower clad layer 2 are polished in such a manner that both surfaces are made flush with each other and thereafter, a clad layer 10 for height adjustment and a core layer are formed on the polished surfaces. The core layer is patterned to form the core 3a. An upper clad layer 4 is thereafter formed and after the front surface of the mound 1a of the silicon substrate is exposed, the semiconductor optical element 6 is mounted thereon. Since the height of the core 3a may be adjusted by the thickness of the clad layer 10 for height adjustment, the matching with the height of the active layer 7 of the semiconductor optical element 6 is facilitated.