| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to discriminate occasions when there are no substrates from those when a substrate is inclined on a mount table, by detecting the posture of the mounted substrate with one photodetector discriminating the difference of angles of reflection of the upper surface of the substrate, and detecting a light reflected from the hole having a bottom of the mount table with the other photodetector when there are no substrates. SOLUTION: A hole 15 having a bottom is formed in the surface of a mount table 12 liked to a robot arm 4. When a substrate 1 is positioned and put on a regular position on the mount table 12, a reflected light by the substrate 1 from a light emitting element 17 is detected by a first photodetector 18a. When there are no substrates 1, a light is reflected by the bottom surface of the hole 15 of the mount table 12, and detected by a second photodetector 18b. Consequently, it becomes possible to make processing at the time of malfunctioning more appropriate, and to increase the rate of operation of processing facilities. And it becomes possible to detect reliability lowering of the conveyance of the processing facilities earlier, and to prevent the generation of troubles.</p> |
