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经营范围
发明名称
ULTRASONIC CLEANING EQUIPMENT
摘要
申请公布号
JPH1140532(A)
申请公布日期
1999.02.12
申请号
JP19970191184
申请日期
1997.07.16
申请人
SONY CORP
发明人
OKAMOTO AKIRA
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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