| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to fix a pellicle into a housing case without contact with the pellicle and to prevent the generation of dust induced by contact of the case and the pellicle by constituting lug pieces in such a manner that the pellicle may be supported without contact only by holding of the lug pieces. SOLUTION: L-shaped retaining parts 11 for holding by pressing the lug pieces 4 projecting from the four corners of a pellicle frame 6a onto a bottom lid are respectively formed at the four corners on the inner side of an upper cap 9. When the upper lid 9 is fixed to the bottom lid by means of clips, the retaining parts 11 at the four corners of the upper lid 9 respectively retain the lug pieces 4 of the liners protruding from the four corners of the pellicle frame 6 so that the pellicle may be securely held. The pellicle may be supported by holding down only the lug pieces 4 without contact with the pellicle by means of the retaining parts 11 for holding down the lug pieces 4. Then, the pellicle does not having contact with the housing case and, therefore, the generation of dust does not arise in case of movement during transportation.</p> |
