THIN-FILM SOLAR CELL AND MANUFACTURE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a thin-film solar cell which is lessened in manufacturing cost while maintaining high conversion efficiency and capable of saving resources and a manufacturing method thereof. SOLUTION: Irregularities are provided to the surface of a p-type single crystal silicon board 1. H ions are implanted in layers into the irregular surface of the p-type single crystal silicon board 1 as deep as 5 to 10 μm. A lower electrode layer 6 is formed on a substrate 4 via the intermediary of an insulating layer 5. The irregular surface of the p-type single-crystal board 1 is bonded to the surface of the lower electrode layer 6. By a heat treatment, the p-type single-crystal silicon board 1 is cut into a rugged single-crystal silicon layer 1a which is bonded onto the lower electrode layer 6 and a residual p-type single- crystal board 1b along a gap region 3a distributed in a layer. Through the heat treatment, n-type impurities are diffused into the p-type single-crystal silicon layer 1a from the lower electrode layer 6 so as to form an n-type diffusion layer 1c.