| 摘要 |
PROBLEM TO BE SOLVED: To obtain an amorphous silicon solar cell whose tonality is changed without largely reducing its efficiency by a method, wherein an oxide thin film whose refractive index is lower than that of a transparent electrode layer is formed on the transparent electrode layer in order to prevent reflection. SOLUTION: A metal electrode layer 2a, an amorphous silicon power- generation layer 3 and an ITO transparent electrode layer 4 are laminated on a flexible insulating substrate 1. In addition, a silicon oxide film 5 (SiOX, where X=1 to 2) is formed by a high-frequency sputtering operation which uses silicon dioxide SiO2 as a target. In this manner, when a film having a low refractive index such as, e.g. the silicon oxide SiOX film 5 is laminated on the ITO transparent electrode layer 4, the tonality of an amorphous silicon solar cell can be controlled by slightly lowering a short circuit current, although the tonality cannot be controlled without a large loss in the short circuit current. As a result, it is possible to obtain an amorphous silicon solar cell, which is superior in the design element of a color such as a green color, a yellow color, an orange color or the like. |
