METHOD FOR STRENGTHENING CHARGED STRIPPER FILM FOR ION BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method for strengthening a charged stripper film for ion beam in which each part of the stripper film can be flexed uniformly without requiring any special jig and the time and labor while prolonging the service life against ion irradiation significantly. SOLUTION: To a holder plate 3 having an opening 2, a carbon foil 1 is applied flatly while covering the opening, and the carbon foil is irradiated with an intense visible light for a short time to form fine creases 7 on the entire surface of the carbon foil at the opening. Luminous flux of the visible light is 200-300 million lumen and the irradiation time is 100-300μs. The visible light is emitted from a xenon flash lamp and a pure carbon foil of about 10μg/cm<2> thick is preferably employed.