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发明名称
METHOD FOR MEASURING FILM THICKNESS DISTRIBUTION
摘要
申请公布号
JPH1137725(A)
申请公布日期
1999.02.12
申请号
JP19970205404
申请日期
1997.07.15
申请人
NIPPON STEEL CORP
发明人
EGUCHI KOHEI
分类号
G01B11/06;H01L21/66;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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