| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable inspection of a specimen having a pattern with a fine line width in a short time by irradiating the specimen with an energy beam to obtain an expanded image of the specimen using an electron released from the specimen. SOLUTION: A specimen 11 is irradiated with an energy beam 16 generated by an energy beam source 15 through a lens 22, a forming aperture 18, an electromagnetic prism 28, a lens 20 and a deflector 21. At this point, an expanded image of the specimen 11 is obtained using an electron 17 released from the specimen 11 by a lens 29, an aperture 32, a photoelectric surface 25 and a lens 24. A detector 27 detects the expanded image and a comparison means 9 compares the detected expanded image with a base data 10 to inspect the specimen 11. The energy beam herein used may be any of an electron beam, a charged particle beam, X rays or a light beam. The irradiation of the energy beam with such a wider area enables taking in of shapes of a pattern at one time thereby achieving a high speed inspection of a detect.</p> |
