DETERGENT FOR PROCESSES FOR PRODUCING SEMICONDUCTOR DEVICES OR PRODUCING LIQUID CRYSTAL DEVICES

摘要

A detergent containing, as the active ingredient, a polyphosphoric acid-urea condensate as a product of reaction of orthophosphoric acid with urea, or a phosphoric acid-urea polymer, and used for cleaning the surfaces of metals and/or glasses in at least either a process for producing semiconductor devices or a process for producing liquid crystal devices. The detergent is highly safe from the standpoint of the environment and work and efficiently removes the etching residues and impurities on the surfaces of metals (inclusive of semimetals) and glasses without causing metal corrosion.