发明名称 Micro-mechanical component production process
摘要 In the production of a micro-mechanical component by producing an element (4) on a sacrificial layer (2) which is then removed using a hydrofluoric acid-containing etching medium, etching of the sacrificial layer (2) is preceded by application of an aluminium metallisation (5) and is succeeded by removal of a superficial contamination layer (6) from the metallisation (5) by a further etching operation. Preferably, the element (4) is protected during this further etching (preferably sputter etching, plasma etching or reactive ion etching) operation by a protective cap (8) which may be left in place as part of a housing for the element (4).
申请公布号 DE19734113(A1) 申请公布日期 1999.02.11
申请号 DE1997134113 申请日期 1997.08.07
申请人 ROBERT BOSCH GMBH, 70469 STUTTGART, DE 发明人 SCHIELEIN, DORIS, 72810 GOMARINGEN, DE;SKAPA, HELMUT, DR., 72770 REUTLINGEN, DE;MUENZEL, HORST, DR., 72770 REUTLINGEN, DE;OFFENBERG, MICHAEL, DR., 72138 KIRCHENTELLINSFURT, DE
分类号 B81C1/00;G01P15/08;(IPC1-7):H01L21/306;H01L49/00 主分类号 B81C1/00
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