The beam generation system has a triple electrode device with a cathode (1), a control electrode (3) and an anode (4), provided with a centre bore through which the electron beam (2) is directed from the beam generation space into a beam guidance space, with a beam cross-over point (9) within the bore. The anode is provided by an anode head (5) having a central bore (8) and an anode sleeve (6) containing at least one aperture stop (7). The bore in the anode head is matched to the beam diameter and is not more than 1 mm greater in diameter than the beam diameter.
申请公布号
DE19730855(C1)
申请公布日期
1999.02.11
申请号
DE1997130855
申请日期
1997.07.18
申请人
AUDI AG, 85057 INGOLSTADT, DE;SAECHSISCHE ELEKTRONENSTRAHL GMBH, 09117 CHEMNITZ, DE
发明人
FURCHHEIM, BODO, DR., 09127 CHEMNITZ, DE;WENDL, JOHANN, 86558 HOHENWART, DE