Scanning probe microscope

摘要

A cantilever for a probe and a piezoelectric cantilever for detecting displacement of the probe are separately installed to a scanning probe microscope, either or both of the cantilever for the probe and the piezoelectric cantilever for detecting displacement of the probe are oscillated by using oscillating means and a force exerted on the probe is detected as a change in resonance characteristic of the piezoelectric cantilever for detecting displacement.