| 摘要 |
<p>There is disclosed an array element examination method in which a relative position of an array element can be examined with a high resolution, in a broad range and relatively inexpensively. Lights from fibers of a fiber array are radiated to a lens array having optical axes corresponding to the fibers arranged substantially parallel with one another, and substantially parallel lights are fetched from the lens array. In order to prevent any trouble from occurring even if a photographing range is limited, images of the parallel lights from the lens array are formed on the substantially identical point by the image forming lens. The formed fiber images are photographed by a CCD camera, and relative positions of the elements are obtained from photographing signals by a computer. It is determined from the deviation from the identical point whether or not the fiber array is good. <IMAGE></p> |
