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发明名称
FORMATION OF CONDUCTOR LAYER WITH NICKEL AS A MAJOR COMPONENT
摘要
申请公布号
JPH1136065(A)
申请公布日期
1999.02.09
申请号
JP19970207086
申请日期
1997.07.16
申请人
SANKEN ELECTRIC CO LTD
发明人
SUGIYAMA KINJI
分类号
C23C14/34;C23C14/35;H01L21/203;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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