| 摘要 |
PROBLEM TO BE SOLVED: To provide the laser processing device which can perform a correction of the laser beam scanning accuracy and a confirmation of the laser processing status simply and in real time. SOLUTION: The device is equipped with a laser beam scanning method 3 which scans the laser beam irradiated from a laser oscillator 1 against a processing object 101, a condenser lens 7 which catches a part of the processing laser beam P through a beam splitter 5, a beam detector unit 9, a liquid crystal mask 13 consisting of the plural number of liquid crystal cells between the beam splitter 5 and the condenser lens 7, and a main control unit 11 which controls to set one or more than two cells of each cell in succession so that the beam can permeate them. The main control unit 11 is equipped with a function to set and control the laser beam permeate timing so that each cell of the liquid crystal mask 13 is arranged in succession to make the beams permeable in response to the information on the scanning positions of the laser beam P irradiated from the laser beam scanning method 3. |
