| 摘要 |
A method of producing trichlorosilane having a reduced content of dichlorosilane, which comprises reacting a mixture of dichlorosilane and trichlorosilane with hydrogen chloride in the presence of activated carbon as a catalyst at a temperature of 0 DEG C. or higher and lower than 75 DEG C. to selectively convert dichlorosilane into trichlorosilane.
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