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发明名称
COATING APPARATUS
摘要
申请公布号
JPH1133471(A)
申请公布日期
1999.02.09
申请号
JP19970197227
申请日期
1997.07.23
申请人
TOKYO ELECTRON LTD
发明人
FUJIMOTO AKIHIRO
分类号
B05C11/08;B05C11/10;F16K31/00;H01L21/00;H01L21/027;(IPC1-7):B05C11/10
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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