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发明名称
X-Y STAGE
摘要
申请公布号
JPH1133857(A)
申请公布日期
1999.02.09
申请号
JP19970186899
申请日期
1997.07.11
申请人
SUMITOMO HEAVY IND LTD
发明人
KATO TATSURO;SUGIMINE MASANOBU
分类号
B23Q1/00;B23Q1/62;(IPC1-7):B23Q1/62
主分类号
B23Q1/00
代理机构
代理人
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