Metallization and wire bonding process for manufacturing power semiconductor devices

摘要

A metallization and bonding process for manufacturing a power semiconductor device includes a step of depositing a first metal layer over the entire surface of a chip; a step of selectively etching of the first metal layer to form desired patterns of metal interconnection lines between components previously defined; a step of depositing a layer of passivating material over the entire surface of the chip; a step of selectively etching of the layer of passivating material down to the first metal layer to define bonding areas represented by uncovered portions of the first metal layer; a step of depositing of a thick second metal layer over the entire surface of the chip; a step of selectively etching of the second metal layer down to the layer of passivating material to remove the second metal layer outside the bonding areas; and a step of connecting bonding wires to the surface of the second metal layer in correspondence of said bonding areas.