MANUFACTURE OF PIEZOELECTRIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To form gaps without deformation for preventing piezoelectric interference a both sides of a piezoelectric element on a piezoelectric substrate housing a plurality of piezoelectric elements. SOLUTION: A method for manufacturing a piezoelectric substrate 41 houses a plurality of piezoelectric elements 16 each of which is so constituted that an electrode 16a for piezoelectric driving and a driving layer 16b that generates piezoelectric distortion by applying a voltage to the electrode 16a are laminated, and comprises gaps 42 for preventing piezoelectric interference provided at both of the sides of the piezoelectric element 16. A groove for setting a width and an interval on the piezoelectric element 16 is formed on a piezoelectric member. A spacer wherein a coating layer made of a predetermined component is coated on a face opposite as side wall of the groove is inserted into the groove. The spacer is bonded to the bottom face of the groove. The coating layer is removed to form a gap 42 after the bonding process.