| 摘要 |
PROBLEM TO BE SOLVED: To produce an ITO sintered compact free from a metal and a lower oxide due to reduction, having high density and usable as a target not causing blackening or generating a nodule and having a long service life. SOLUTION: When a powdery mixture consisting essentially of indium oxide powder and tin oxide powder is compacted or presintered and subjected to hot isostatic pressing to produce an ITO sintered compact, the reduction of the compacted or presintered mixture is inhibited in the hot isostatic pressing by coating a part or the whole of the inside of a vessel housing the mixture with one or more selected from among indium, tin, indium oxide, tin oxide, an indium-tin alloy and indium-tin double oxide. |
