| 摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration in the deflective strength of a molybdenum- tungsten based target. SOLUTION: This molybdenum-tungsten based target is the one essentially consisting of molybdenum and tungsten and having a structure in which molybdenum particles and tungsten particles are sintered with joining of <=10μm. Preferably, its coercive force is regulated to >=750 MPa, the average particle size is regulated to <=30μm, its density is regulated to >=98% in the relative density.
|
