发明名称 |
Method for calibration of a spectroscopic sensor |
摘要 |
A novel method for calibration of a spectroscopic sensor is provided. In the method, a spectroscopic system is provided. The system includes a measurement cell having one or more walls which at least partially enclose a sample region. The cell further includes a light entry port and a light exit port. The light entry port and the light exit port can be the same port or separate ports. Each of the ports contains a light transmissive window through which a light beam passes along an internal light path inside the measurement cell. The system further has an optical chamber which contains a light source for generating the light beam which passes through the light entry port into the cell, and a detector for measuring the light beam exiting the cell through the light exit port. The light beam passes along an external light path inside the optical chamber. In addition, a gas inlet is connected to the optical chamber. A calibration gas stream is introduced into the optical chamber. The calibration gas stream contains a calibrating gas species and a carrier gas. The calibrating gas species is present in the calibration gas stream in a known concentration. A spectroscopy measurement of the calibration gas stream is then performed. The method finds particular applicability in the calibration of an in-line spectroscopic sensor useful in the detection of molecules of interest in a semiconductor processing tool. |
申请公布号 |
AU8474098(A) |
申请公布日期 |
1999.02.08 |
申请号 |
AU19980084740 |
申请日期 |
1998.07.07 |
申请人 |
L:AIR LIQUIDE SOCIETE ANONYME POUR L:ETUDE ET L:EXPLOITATION DE |
发明人 |
JAMES J. F. MCANDREW;RONALD S. INMAN |
分类号 |
G01J3/28;G01J3/42;G01N21/03;G01N21/27 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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