发明名称 Semiconductor single-crystal lift device
摘要 A semiconductor single crystal lift device which comprises a crucible for melting materials for forming semiconductor single crystals and a radiation screen disposed at an upper portion of the crucible and formed of a reversed-cone-shaped adiabatic tube surrounding a lift zone, the apparatus being adopted for lifting up the semiconductor single crystal from a melt in the crucible, in which the radiation screen is divided into more than three adiabatic members, at least part of the adiabatic members being configured in a detachable fashion so that an adiabatic nature of the radiation screen can be partly altered.
申请公布号 US5868836(A) 申请公布日期 1999.02.09
申请号 US19970786766 申请日期 1997.01.21
申请人 KOMATSU ELECTRONIC METAL CO., LTD. 发明人 NAKAMURA, SHIGEKI;SHIMOMURA, KOICHI;UCHIYAMA, TERUHIKO
分类号 C30B15/00;C30B15/22;C30B29/06;C30B35/00;H01L21/208;(IPC1-7):C30B35/00 主分类号 C30B15/00
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