A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm (44) that learns characteristics of a wavelength chirp from a laser (34) and a computer system (46) that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
申请公布号
WO9905759(A1)
申请公布日期
1999.02.04
申请号
WO1998US12349
申请日期
1998.06.17
申请人
CYMER, INC.;EVERAGE, GEORGE, J.;FOMENKOV, IGOR V.;DAS, PALASH, P.;SANDSTROM, RICHARD, L.
发明人
EVERAGE, GEORGE, J.;FOMENKOV, IGOR V.;DAS, PALASH, P.;SANDSTROM, RICHARD, L.