Kathode zum Beschichten eines Substrats,申请号DE19925009599-传众专利搜索

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发明名称	Kathode zum Beschichten eines Substrats
摘要
申请公布号	DE59209599(D1)	申请公布日期	1999.02.04
申请号	DE19925009599	申请日期	1992.07.10
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE	发明人	WOLF, BERND, W-6450 HANAU 1, DE;MUELLER, JUERGEN, DR., W-6000 FRANKFURT 50, DE;NEUDERT, HANS, W-6463 FREIGERICHT, DE
分类号	C23C14/34;H01J37/34;(IPC1-7):H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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