| 摘要 |
PROBLEM TO BE SOLVED: To secure high safety by providing a light emitting part and a light receiving part at an opening part on a device side and an opening part on the side of an automated guided vehicle, forming a light curtain between them, and stopping the operation of a transferring robot when the light curtain is interrupted. SOLUTION: A light receiving part 25-1 or 25-2 is respectively fixed to the opening part of a transferring part 10a. A light emitting part 24-1 or 24-2 is respectively fixed to the opening part of a load port 121 provided on a device 120. Beams emitted by each light emitting element 24a enter an opposed light receiving element 25a to form the light curtain between the port 121 and the automated guided vehicle 10. For example, when an operator, etc., enters the transferring area by an arm 103 from a space between the device 120 and the vehicle 10 during the transferring operation of a wafer cassette 102, etc., one of the beams entering the element 25a from the element 24a is interrupted. Thereby, the output of a detecting signal is stopped and as the result, a driving part is not given an input to stop the operation of the arm 103. |
