| 摘要 |
PROBLEM TO BE SOLVED: To provide the slitting method for an optical waveguide component which facilitates the formation of a slit, prolongs the life of a blade, and hardly cracks the slit. SOLUTION: The slit 27 for inserting an optical component into an optical waveguide core 22 is formed by etching and mechanical cutting in an optical waveguide component having an optical waveguide formed of an inside clad 21, the optical waveguide core 22, and an outside clad 23 on an Si substrate 10. Consequently, The cutting quantity of the hard optical waveguide part becomes small and damage to the blade 20 at the time of the formation of the slit 27 is reduced. The etched slit 27 hardly cracks. |
