摘要 |
PROBLEM TO BE SOLVED: To obtain an electrically conductive antireflection film having a thin film shape, high electric conductivity, high visible light transmissivity, low visible light reflectance, high moisture resistance and superior aging stability. SOLUTION: The electrically conductive antireflection film 2 comprises a silver-base thin film 23 and transparent thin oxide films 21, 22, 24, 25 holding the silver-base thin film 23. The transparent thin oxide films 21, 22, 24, 25 are made of a quaternary mixed oxide contg. tin oxide, indium oxide, cerium oxide and gallium oxide, the concn. of indium or tin in the films 21, 22, 24, 25 varies in the thickness direction and the silver-base thin film 23 contains >=1.5 at.% elemental gold. |