| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacture method of a semiconductor optical device, which arranges resin having a gentle end face only in a regulated part near the step of a ridge and the like, and to provide a semiconductor optical device. SOLUTION: In the manufacture method of the ridge-type semiconductor optical device having a ridge-like optical waveguide, resin 13 having the gentle end face is arranged only at the regulated place near the step of the ridge 11a and the like. Thus, heat treatment is executed in a low temperature at the degree of drying after resin 13 is applied. A photoresist pattern on resin 13 is baked and resin 13 is dissolved at the same time as development with developer at the time of developing photoresist 14 so as to form the pattern. The pattern is baked and developed after photosensitive resin is applied. The photosensitive resin pattern is formed at a prescribed place near the ridge. |
