| 摘要 |
<p>PROBLEM TO BE SOLVED: To achieve a highly accurate positioning without damaging a stage even if a temperature changes by performing a guide regarding one direction of a stage that moves in two directions that orthogonally cross with a single fixing guide. SOLUTION: A movement guiding device constituted of, for example, a surface plate 1, a Y stage 4, an X stage 5, a fixing guide 2 in horizontal direction of the Y stage 4, and drive actuators 4c and 5d that are, for example, linear motors for the Y stage 4 and X stage 5. The Y stage 4 and the X stage 5 are lifted by static pressure air bearings, and a pre-load mechanism using, for example, a magnet for preventing inclination on floating is also used. Even if the surface plate 1 and the fixing guide 2 are made of a magnetic body for pre-loading magnet and the Y stage 4 and the X stage 5 are made of ceramic for reducing weight and increasing stiffness, more specifically they are made of members with different thermal coefficients of expansion, no characteristics change even if a temperature difference occurs since only one fixing guide 2 is used and only the guide surface of one surface is referred to.</p> |
